Agilent Impedance Measurement.pdf:Agilent Impedance Measurement.pdf
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TABLE OF CONTENTS
SECTION 1 Impedance measurement basics
Paragraph 1-1 Impedance .............................................................................. 1-1
1-2 Measuring impedance ............................................................ 1-3
1-3 Parasitics: there are no pure R, C or L ................................. 1-3
1-4 True, effective and indicated values ..................................... 1-4
1-5 Component dependency factors ............................................. 1-5
SECTION 2 Impedance measurement instruments
Paragraph 2-1 Measurement methods .......................................................... 2-1
2-2 Operating theory of practical instruments ........................... 2-5
––––––– LF impedance measurement –––––––
2-3 Theory of auto balancing bridge method .............................. 2-5
2-4 Key measurement functions .................................................. 2-8
2-4-1 OSC level ................................................................................ 2-8
2-4-2 DC bias ................................................................................... 2-9
2-4-3 Ranging function .................................................................... 2-10
2-4-4 Level monitor function ........................................................... 2-11
2-4-5 Measurement time and averaging ........................................ 2-11
2-4-6 Compensation function .......................................................... 2-12
2-4-7 Guarding ................................................................................. 2-13
2-4-8 Grounded device measurement capability ........................... 2-14
––––––– RF impedance measurement –––––––
2-5 Theory of RF I-V measurement method ............................... 2-16
2-6 Difference between RF I-V and network analysis
methods .................................................................................. 2-18
2-7 Key measurement functions .................................................. 2-20
2-7-1 OSC level ................................................................................ 2-20
2-7-2 Test port ................................................................................. 2-20
2-7-3 Calibration ............................................................................. 2-21
2-7-4 Compensation ......................................................................... 2-21
2-7-5 Measurement range ............................................................... 2-21
2-7-6 DC bias ................................................................................... 2-21
––––––– LF impedance measurement –––––––
Paragraph 3-1 Terminal configuration .......................................................... 3-1
3-2 Using test cables at high frequencies ................................... 3-5
3-3 Test fixtures ........................................................................... 3-5
3-3-1 Agilent supplied test fixtures ................................................ 3-5
3-3-2 User fabricated test fixtures ................................................. 3-6
3-3-3 User test fixture example ...................................................... 3-7
3-4 Test cables .............................................................................. 3-8
3-4-1 Agilent supplied test cables ................................................... 3-8
3-4-2 User fabricated test cable ...................................................... 3-8
3-4-3 Test cable extension ............................................................... 3-9
3-5 Eliminating the stray capacitance effects ............................ 3-12
––––––– RF impedance measurement –––––––
3-6 Terminal configuration in RF region .................................... 3-12
3-7 RF test fixtures ...................................................................... 3-13
3-7-1 Agilent supplied RF test fixtures .......................................... 3-14
3-8 Test port extension in RF region ........................................... 3-15
SECTION 4 Measurement error and compensation
––––––– Basic concepts and LF impedance measurement –––––––
Paragraph 4-1 Measurement error ................................................................ 4-1
4-2 Calibration and compensation .............................................. 4-1
4-2-1 Offset compensation ............................................................... 4-2
4-2-2 Open and short compensations ............................................. 4-2
4-2-3 Precautions for open and short measurements .................... 4-3
4-2-4 Open, short and load compensations .................................... 4-4
4-2-5 What should be used as the load? ......................................... 4-5
4-2-6 Application limit for open, short and
load compensations ................................................................ 4-7
4-3 Error caused by contact resistance ....................................... 4-7
4-4 Measurement cable extension induced error ....................... 4-9
4-5 Practical compensation examples ......................................... 4-11
––––––– RF impedance measurement –––––––
4-6 Calibration and compensation in RF region ......................... 4-13
4-6-1 Calibration ............................................................................. 4-13
4-6-2 Error source model ................................................................. 4-14
4-6-3 Compensation method ........................................................... 4-15
4-6-4 Precautions for open and short measurements
in RF region ............................................................................ 4-15
4-6-5 Consideration for short compensation .................................. 4-16
4-6-6 Calibrating load device .......................................................... 4-17
4-6-7 Electrical length compensation ............................................. 4-18
4-6-8 Practical compensation technique ........................................ 4-19
4-7 Measurement correlation and repeatability ......................... 4-19
4-7-1 Variance in residual parameter value .................................. 4-19
4-7-2 A difference in contact condition ........................................... 4-20
4-7-3 A difference in open and short compensation conditions .... 4-21
4-7-4 Electromagnetic coupling with a conductor
near the DUT ......................................................................... 4-21
4-7-5 Variance in environmental temperature............................... 4-22
SECTION 5 Impedance measurement applications and enhancements
Paragraph 5-1 Capacitor measurement ........................................................ 5-1
5-2 Inductor measurement .......................................................... 5-5
5-3 Transformer measurement .................................................... 5-9
5-4 Diode measurement ............................................................... 5-13
5-5 MOS FET measurement ........................................................ 5-14
5-6 Silicon wafer C-V measurement ............................................ 5-15
5-7 High frequency impedance measurement
using the probe ....................................................................... 5-18
5-8 Resonator measurement ........................................................ 5-20
5-9 Cable measurements ............................................................. 5-23
5-10 Balanced device measurement .............................................. 5-25
5-11 Battery measurement ............................................................ 5-27
5-12 Test signal voltage enhancement .......................................... 5-28
5-13 DC bias voltage enhancement ............................................... 5-30
5-14 DC bias current enhancement .............................................. 5-32
5-15 Equivalent circuit analysis function and its application ..... 5-34
APPENDIX A The concept of a test fixture’s additional error ............................ A-1
APPENDIX B Open and short compensation ...................................................... B-1
APPENDIX C Open, short and load compensation ............................................. C-1
APPENDIX D Electrical length compensation ..................................................... D-1
APPENDIX E Q measurement accuracy calculation ........................................... E-1
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