Reliability of MEMS: Testing of Materials and Devices:Reliability of MEMS: Testing of Materials and Devices
Author(s): Osamu Tabata
Publisher: Wiley
Date : 2008
Pages : 324
Format : PDF
OCR : Y
Quality :
Language : English
ISBN-10 : 3527314946
ISBN-13 :
Review
"The book will undoubtedly be of interest to MEMS practitioners and researchers." (Journal of Applied Electrochemistry, February 2008)
"The book will undoubtedly be of interest to MEMS practitioners and researchers." (Journal of Applied Electrochemistry, February 2008)
Product Description
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
See all Editorial Reviews
Contents
Preface V
Foreword VII
List of Contributors XI
Overview XIII
1 Evaluation of Mechanical Properties of MEMS Materials and Their
Standardization 1
Toshiyuki Tsuchiya
2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials
and Coating–Substrate Systems 27
Mototsugu Sakai
3 Thin-fi lm Characterization Using the Bulge Test 67
Oliver Paul, Joao Gaspar
4 Uniaxial Tensile Test for MEMS Materials 123
Takahiro Namazu
5 On-chip Testing of MEMS 163
Harold Kahn
6 Reliability of a Capacitive Pressure Sensor 185
Fumihiko Sato, Hideaki Watanabe, Sho Sasaki
7 Inertial Sensors 205
Osamu Torayashiki, Kenji Komaki
8 Inertial Sensors 225
Noriyuki Yasuike
9 Reliability of MEMS Variable Optical Attenuator 239
Hiroshi Toshiyoshi, Keiji Isamoto, Changho Chong
10 Eco Scan MEMS Resonant Mirror 267
Yuzuru Ueda, Akira Yamazaki
Index 291
[ 本帖最后由 drjiachen 于 2008-12-31 10:09 编辑 ]
thank you for the book
迫切期待中。。。。。。。。:19bb
老哥怎么还不传啊
Reliability of MEMS
ص
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回复 多谢。。。。。。。。。。。。。。。。。。。。。。。。。。。。
xuexi..................................................
I see the book,thank you for the book,and happy new year
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感谢楼主分享
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好东西大家一起分享:30bb :31bb
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好东西大家一起分享 :27bb :11bb
I will study it,thank you for sharing it
感谢楼主分享!!!!!!!!!!!!!!!!!!!!!!111
:27bb:21bb:22bb
回复 多谢。。。。。。。。。。。。。。。。。。。。。。。。。。。。
以前学习MEMS的，再了解。感谢楼主。
这是很经典的书籍,谢谢楼主
好好学习下哈,谢谢了.
好东西啊 谢谢
能不能下载么?
为什么不能够下载?
多谢了, 学学看
回复 6# gongxun
Thanks a lot!
好书 ，谢谢。。。。。。。。。。。
多谢。。。。。。。。。。。。。。。。。。。。。。。。。。。。
呵呵，楼主把书藏起来了
终于可以回帖了，感谢人民感谢党
终于可以回帖了，感谢人民感谢党
多谢楼主。
thank you for your sharing
{:7_1234:}
哈哈，原来是本书啊！好东东，值得收藏！
Many thanks!
多谢楼主。
:48bb:16bb:26bb
看看{:7_1235:}
回复了 多谢
MEMS现在很前沿，在微波中的应用很有前景
very good
看看，呵呵
想看这本书，谢谢楼主
感謝分享！{:soso_e102:}
xiexie louzhu ! wo kan lkan!
好东西，看看吧
好
看看
HIHIHIHIHIHIHIHIHIHIHI
kan kan
kankan
Thanks for sharing
ghjyrjr6yju67ju67ji67u 67u6
Reliability of MEMS.rar (4.5 MB) 
