几篇关于RF MEMS工艺开关的文章: High isolation MEMS shunt switches - modeling.pdf

A capacitive RF MEMS shunt switch
A low-voltage and low-power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces
High isolation MEMS shunt switches - design
High isolation MEMS shunt switches - modeling

[ 本帖最后由 悦然 于 2008-12-14 00:00 编辑 ]

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